Propagation Characteristics of Surface Acoustic Waves in AlN/128°Y-X LiNbO3 Structures
نویسندگان
چکیده
In this study, propagation characteristics of surface acoustic waves in a layered piezoelectric structure (AlN/128°Y-X LiNbO3) are investigated. The phase velocity and coupling coefficient of the layered structure with interdigital transducers and/or metal thin films deposited at various interfaces will be calculated numerically. The effects of the polarity of 128°Y-X LiNbO3 on SAW characteristics are illustrated. Calculated phase velocity and coupling coefficient of SAWs in the IDT/ZnO/128°Y-X LiNbO3 structure are also demonstrated for comparison. Simulation results obtained in this study can be applied for the design of SAW devices using AlN/128°Y-X LiNbO3 structures.
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